Z. Wang, X. Y. Xiong, K. F. Wang, W. H. Yang, Z. T. Li, X. D. Zou. Enhancing Sensitivity Using Electrostatic Spring in Coupling Mode-Localized Mems Accelerometer. In 16th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021, Xiamen, China, April 25-29, 2021. pages 311-314, IEEE, 2021. [doi]
@inproceedings{WangXWYLZ21,
title = {Enhancing Sensitivity Using Electrostatic Spring in Coupling Mode-Localized Mems Accelerometer},
author = {Z. Wang and X. Y. Xiong and K. F. Wang and W. H. Yang and Z. T. Li and X. D. Zou},
year = {2021},
doi = {10.1109/NEMS51815.2021.9451485},
url = {https://doi.org/10.1109/NEMS51815.2021.9451485},
researchr = {https://researchr.org/publication/WangXWYLZ21},
cites = {0},
citedby = {0},
pages = {311-314},
booktitle = {16th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021, Xiamen, China, April 25-29, 2021},
publisher = {IEEE},
isbn = {978-1-6654-1941-3},
}