Enhancing Sensitivity Using Electrostatic Spring in Coupling Mode-Localized Mems Accelerometer

Z. Wang, X. Y. Xiong, K. F. Wang, W. H. Yang, Z. T. Li, X. D. Zou. Enhancing Sensitivity Using Electrostatic Spring in Coupling Mode-Localized Mems Accelerometer. In 16th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021, Xiamen, China, April 25-29, 2021. pages 311-314, IEEE, 2021. [doi]

Abstract

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