Multifunctional Platform with CMOS-Compatible Tungsten Microhotplate for Pirani, Temperature, and Gas Sensor

Jiaqi Wang, Jun Yu. Multifunctional Platform with CMOS-Compatible Tungsten Microhotplate for Pirani, Temperature, and Gas Sensor. Micromachines, 6(11):1597-1605, 2015. [doi]

Abstract

Abstract is missing.