Motion control of nanomanipulation platform based on feedforward compensation inside SEM - researchr publication authors

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Mingyu Wang, Zhan Yang, Tao Chen, Lining Sun, Toshio Fukuda. Motion control of nanomanipulation platform based on feedforward compensation inside SEM. In 14th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019, Bangkok, Thailand, April 11-14, 2019. pages 370-374, IEEE, 2019. [doi]

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