Mingyu Wang, Zhan Yang, Tao Chen, Lining Sun, Toshio Fukuda. Motion control of nanomanipulation platform based on feedforward compensation inside SEM. In 14th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019, Bangkok, Thailand, April 11-14, 2019. pages 370-374, IEEE, 2019. [doi]
@inproceedings{WangYCSF19, title = {Motion control of nanomanipulation platform based on feedforward compensation inside SEM}, author = {Mingyu Wang and Zhan Yang and Tao Chen and Lining Sun and Toshio Fukuda}, year = {2019}, doi = {10.1109/NEMS.2019.8915647}, url = {https://doi.org/10.1109/NEMS.2019.8915647}, researchr = {https://researchr.org/publication/WangYCSF19}, cites = {0}, citedby = {0}, pages = {370-374}, booktitle = {14th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019, Bangkok, Thailand, April 11-14, 2019}, publisher = {IEEE}, isbn = {978-1-7281-1629-7}, }