Nan Wang, Shinya Yoshida, Masafumi Kumano, Yusuke Kawai, Masayoshi Esashi. Fabrication of high-aspect-ratio PZT structure by nanocomposite sol-gel method for laterally-driven piezoelectric MEMS switch. In 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012, Kyoto, Japan, March 5-8, 2012. pages 247-252, IEEE, 2012. [doi]
Abstract is missing.