Low-Drift MEMS Thermal Wind Sensor With Symmetric Packaging Using Plastic Injection Molding Process

Zhenjun Wang, Zhenxiang Yi, Ming Qin, Qing-An Huang. Low-Drift MEMS Thermal Wind Sensor With Symmetric Packaging Using Plastic Injection Molding Process. IEEE T. Instrumentation and Measurement, 70:1-8, 2021. [doi]

Abstract

Abstract is missing.