Linearity and Sensitivity Analysis of MEMS Thermal Wind Sensor via Analytical Model

Zhenjun Wang, Zhenxiang Yi, Ming Qin, Qing-An Huang, Zai-Fa Zhou. Linearity and Sensitivity Analysis of MEMS Thermal Wind Sensor via Analytical Model. IEEE T. Instrumentation and Measurement, 72:1-9, 2023. [doi]

Abstract

Abstract is missing.