Chatter Suppression with Piezoelectric Film for Microstructure Surface Structuring

Yang Wang, Lue Zhang, Tao Chen, Lining Sun. Chatter Suppression with Piezoelectric Film for Microstructure Surface Structuring. In 13th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2018, Singapore, Singapore, April 22-26, 2018. pages 599-602, IEEE, 2018. [doi]

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