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First Monolithic Integration of Group IV Waveguide Photodetectors and Modulators on 300 mm Si Substrates for 2-μm Wavelength Optoelectronic Integrated Circuit

Haibo Wang, Gong Zhang, Yue Chen, Jishen Zhang, Kaizhen Han, Yi-Chiau Huang, Xiao Gong. First Monolithic Integration of Group IV Waveguide Photodetectors and Modulators on 300 mm Si Substrates for 2-μm Wavelength Optoelectronic Integrated Circuit. In IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits 2022), Honolulu, HI, USA, June 12-17, 2022. pages 407-408, IEEE, 2022. [doi]

Authors

Haibo Wang

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Gong Zhang

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Yue Chen

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Jishen Zhang

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Kaizhen Han

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Yi-Chiau Huang

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Xiao Gong

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