Multiple-Degree-of-Freedom Modeling and Simulation for Seismic-Grade Sigma-Delta MEMS Capacitive Accelerometers

Xuefeng Wang, Penghao Zhang, Shijin Ding. Multiple-Degree-of-Freedom Modeling and Simulation for Seismic-Grade Sigma-Delta MEMS Capacitive Accelerometers. Sensors, 23(12):5394, 2023. [doi]

Abstract

Abstract is missing.