A Study on the Harmonic Distortion of Seismic-Grade Sigma-Delta MEMS Accelerometers Using a Multiple Degree-of-Freedom Model

Xuefeng Wang, Penghao Zhang, Shijin Ding. A Study on the Harmonic Distortion of Seismic-Grade Sigma-Delta MEMS Accelerometers Using a Multiple Degree-of-Freedom Model. Sensors, 23(19):8222, October 2023. [doi]

Abstract

Abstract is missing.