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Fabrication of 128×128 element optical switch array by micromachining technology

S. B. Wang, S. B. Zhou, G. Huang, B. F. Xiong, S. H. Chen, X. J. Yi. Fabrication of 128×128 element optical switch array by micromachining technology. Microprocessors and Microsystems, 29(1):21-25, 2005. [doi]

Authors

S. B. Wang

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S. B. Zhou

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G. Huang

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B. F. Xiong

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S. H. Chen

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X. J. Yi

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