Fabrication of 128×128 element optical switch array by micromachining technology

S. B. Wang, S. B. Zhou, G. Huang, B. F. Xiong, S. H. Chen, X. J. Yi. Fabrication of 128×128 element optical switch array by micromachining technology. Microprocessors and Microsystems, 29(1):21-25, 2005. [doi]

@article{WangZHXCY05:0,
  title = {Fabrication of 128×128 element optical switch array by micromachining technology},
  author = {S. B. Wang and S. B. Zhou and G. Huang and B. F. Xiong and S. H. Chen and X. J. Yi},
  year = {2005},
  doi = {10.1016/j.micpro.2004.07.003},
  url = {http://dx.doi.org/10.1016/j.micpro.2004.07.003},
  researchr = {https://researchr.org/publication/WangZHXCY05%3A0},
  cites = {0},
  citedby = {0},
  journal = {Microprocessors and Microsystems},
  volume = {29},
  number = {1},
  pages = {21-25},
}