MEMS Piezoelectric Vibration Energy Harvester with In-Plane PZT Bimorph

Lu Wang, Libo Zhao, Zhuangde Jiang, Xiang Li, Zihang Chen, Ryutaro Maeda. MEMS Piezoelectric Vibration Energy Harvester with In-Plane PZT Bimorph. In 14th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019, Bangkok, Thailand, April 11-14, 2019. pages 355-359, IEEE, 2019. [doi]

Abstract

Abstract is missing.