A Novel High-Sensitivity MEMS Pressure Sensor for Rock Mass Stress Sensing

Honghui Wang, Dingkang Zou, Peng Peng, Guangle Yao, Jizhou Ren. A Novel High-Sensitivity MEMS Pressure Sensor for Rock Mass Stress Sensing. Sensors, 22(19):7593, 2022. [doi]

Abstract

Abstract is missing.