Lukang Wang, You-Zhao, Yulong Zhao, Yu Yang, Bo Li, Taobo Gong. Mass fabrication of 4H-SiC high temperature pressure sensors by femtosecond laser etching. In 16th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021, Xiamen, China, April 25-29, 2021. pages 1478-1481, IEEE, 2021. [doi]
Abstract is missing.