Peng Wang, Yulong Zhao, You-Zhao, Qi Zhang, Zixi Wang. High performance piezoresistive accelerometer based on the slot etching in the EB(eight-beam) structure. In 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017, Los Angeles, CA, USA, April 9-12, 2017. pages 406-409, IEEE, 2017. [doi]
Abstract is missing.