Density Evaluation of Silicon Thermal-Oxide Layers on Silicon Crystals by the Pressure-of-Flotation Method

Atsushi Waseda, Kenichi Fujii. Density Evaluation of Silicon Thermal-Oxide Layers on Silicon Crystals by the Pressure-of-Flotation Method. IEEE T. Instrumentation and Measurement, 56(2):628-631, 2007. [doi]

Abstract

Abstract is missing.