Two-axis scanning micro mirror device with thick film metallic glass Cu-Zr-Ti and Parylene-C - researchr publication authors

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Shigetaka Watanabe, Yutaka Nakamitsu, Sakurai Junpei, Mizue Mizojiri, Seiichi Hata. Two-axis scanning micro mirror device with thick film metallic glass Cu-Zr-Ti and Parylene-C. In 2014 International Symposium on Micro-NanoMechatronics and Human Science, MHS 2014, Nagoya, Japan, November 10-12, 2014. pages 1-4, IEEE, 2014. [doi]

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