Shigetaka Watanabe, Yutaka Nakamitsu, Sakurai Junpei, Mizue Mizojiri, Seiichi Hata. Two-axis scanning micro mirror device with thick film metallic glass Cu-Zr-Ti and Parylene-C. In 2014 International Symposium on Micro-NanoMechatronics and Human Science, MHS 2014, Nagoya, Japan, November 10-12, 2014. pages 1-4, IEEE, 2014. [doi]
@inproceedings{WatanabeNJMH14,
title = {Two-axis scanning micro mirror device with thick film metallic glass Cu-Zr-Ti and Parylene-C},
author = {Shigetaka Watanabe and Yutaka Nakamitsu and Sakurai Junpei and Mizue Mizojiri and Seiichi Hata},
year = {2014},
doi = {10.1109/MHS.2014.7006094},
url = {http://dx.doi.org/10.1109/MHS.2014.7006094},
researchr = {https://researchr.org/publication/WatanabeNJMH14},
cites = {0},
citedby = {0},
pages = {1-4},
booktitle = {2014 International Symposium on Micro-NanoMechatronics and Human Science, MHS 2014, Nagoya, Japan, November 10-12, 2014},
publisher = {IEEE},
isbn = {978-1-4799-6678-3},
}