BEoL Reliability, XPS and REELS Study on low-k Dielectrics to understand Breakdown Mechanisms - researchr publication authors

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B. Wehring, R. Hoffmann, L. Gerlich, M. Czernohorsky, B. Uhlig, R. Seidel, T. Barchewitz, F. Schlaphof, Lutz Meinshausen, C. Leyens. BEoL Reliability, XPS and REELS Study on low-k Dielectrics to understand Breakdown Mechanisms. In 2020 IEEE International Reliability Physics Symposium, IRPS 2020, Dallas, TX, USA, April 28 - May 30, 2020. pages 1-5, IEEE, 2020. [doi]

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