Hsiang-Chun Wei, G.-D. J. Su. A large-stroke deformable mirror by gear shaped IPMC design. In 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011, Kaohsiung, Taiwan, February 20-23, 2011. pages 113-116, IEEE, 2011. [doi]
Abstract is missing.