Micromachined probes for on-wafer measurement of millimeter- and submillimeter-wave devices and components

Robert M. Weikle, N. Scott Barker, Arthur W. Lichtenberger, Matthew F. Bauwens. Micromachined probes for on-wafer measurement of millimeter- and submillimeter-wave devices and components. In IEEE Global Conference on Signal and Information Processing, GlobalSIP 2013, Austin, TX, USA, December 3-5, 2013. pages 707-710, IEEE, 2013. [doi]

Abstract

Abstract is missing.