Lih Wen-Chen, Satish T. S. Bukkapatnam, Prahalada K. Rao, Naga Chandrasekharan, Ranga Komanduri. Adaptive Neuro-Fuzzy Inference System Modeling of MRR and WIWNU in CMP Process With Sparse Experimental Data. IEEE T. Automation Science and Engineering, 5(1):71-83, 2008. [doi]
Abstract is missing.