Sheng-Fan Wen, Jia-Yush Yen, Shih-Tang Liu, Fu-Cheng Wang, Min-Shin Chen, Yung-Yaw Chen, Chung-Wen Hung. Compensation of the residual error from the charge feedback control of a piezoelectric-actuated stage. J. Systems & Control Engineering, 231(5):414-424, 2017. [doi]
Abstract is missing.