High-resolution noncontact electrostatic voltage meter based on microsensor chip

Xiaolong Wen, Pengfei Yang, Bo Zhang, Chunrong Peng. High-resolution noncontact electrostatic voltage meter based on microsensor chip. In 16th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021, Xiamen, China, April 25-29, 2021. pages 1893-1896, IEEE, 2021. [doi]

Abstract

Abstract is missing.