Simulation and experiments of intrinsic bending of multilayer microcantilever for maskless scanning plasma etching - researchr publication authors

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Li Wen, Hongjiang Zeng, Zheng Yuan, Jiaru Chu, Hai Wang. Simulation and experiments of intrinsic bending of multilayer microcantilever for maskless scanning plasma etching. In 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011, Kaohsiung, Taiwan, February 20-23, 2011. pages 634-637, IEEE, 2011. [doi]

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