Li Wen, Hongjiang Zeng, Zheng Yuan, Jiaru Chu, Hai Wang. Simulation and experiments of intrinsic bending of multilayer microcantilever for maskless scanning plasma etching. In 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011, Kaohsiung, Taiwan, February 20-23, 2011. pages 634-637, IEEE, 2011. [doi]
Abstract is missing.