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Bringing the Lab to the Fab: Robot-Based Inline Measurement System for Precise 3-D Surface Inspection in Vibrational Environments

Daniel Wertjanz, Ernst Csencsics, Thomas Kern, Georg Schitter. Bringing the Lab to the Fab: Robot-Based Inline Measurement System for Precise 3-D Surface Inspection in Vibrational Environments. IEEE Transactions on Industrial Electronics, 69(10):10666-10673, 2022. [doi]

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