Predictive-model-based MIMO motion control of an unstable 6-DoF hexapod stage for overlay measurements - researchr publication authors

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Gert Witvoet, Stefan Kulper, Geerten Kramer, Max Baeten. Predictive-model-based MIMO motion control of an unstable 6-DoF hexapod stage for overlay measurements. In IEEE Conference on Control Technology and Applications, CCTA 2017, Mauna Lani Resort, HI, USA, August 27-30, 2017. pages 726-731, IEEE, 2017. [doi]

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