Thermal and voltage instabilities of hafnium oxide films prepared by sputtering technique

Hei Wong, B. L. Yang, Shurong Dong. Thermal and voltage instabilities of hafnium oxide films prepared by sputtering technique. Microelectronics Reliability, 53(12):1863-1867, 2013. [doi]

@article{WongYD13,
  title = {Thermal and voltage instabilities of hafnium oxide films prepared by sputtering technique},
  author = {Hei Wong and B. L. Yang and Shurong Dong},
  year = {2013},
  doi = {10.1016/j.microrel.2013.06.006},
  url = {http://dx.doi.org/10.1016/j.microrel.2013.06.006},
  researchr = {https://researchr.org/publication/WongYD13},
  cites = {0},
  citedby = {0},
  journal = {Microelectronics Reliability},
  volume = {53},
  number = {12},
  pages = {1863-1867},
}