Improved device variability in scaled MOSFETs with deeply retrograde channel profile

Jason Woo, P. Y. Chien, Frank Yang, S. C. Song, Chidi Chidambaram, Joseph Wang, Geoffrey Yeap. Improved device variability in scaled MOSFETs with deeply retrograde channel profile. Microelectronics Reliability, 54(6-7):1090-1095, 2014. [doi]

Abstract

Abstract is missing.