Robert Wright II, Marlin Shopbell, Kristin Rust, Silpa Sigireddy. Wafer fabrication: effects of metrology load port buffering in automated 300mm factories. In Jane L. Snowdon, John M. Charnes, editors, Proceedings of the 34th Winter Simulation Conference: Exploring New Frontiers, San Diego, California, USA, December 8-11, 2002. pages 1359-1364, ACM, 2002. [doi]
Abstract is missing.