Electromechanical ΔΣ modulation with high-Q micromechanical accelerometers and pulse density modulated force feedback

Jiangfeng Wu, L. Richard Carley. Electromechanical ΔΣ modulation with high-Q micromechanical accelerometers and pulse density modulated force feedback. IEEE Trans. on Circuits and Systems, 53(2):274-287, 2006. [doi]

Abstract

Abstract is missing.