A novel approach to scheduling of single-arm cluster tools with wafer revisiting - researchr publication authors

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Naiqi Wu, Feng Chu, Chengbin Chu, MengChu Zhou. A novel approach to scheduling of single-arm cluster tools with wafer revisiting. In IEEE Conference on Automation Science and Engineering, CASE 2009, Bangalore, India, 22-25 August, 2011. pages 567-572, IEEE, 2009. [doi]

This author has not been identified. Look up 'Naiqi Wu' in GoogleThis author has not been identified. Look up 'Feng Chu' in GoogleThis author has not been identified. Look up 'Chengbin Chu' in GoogleThis author has not been identified. Look up 'MengChu Zhou' in Google

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