Naiqi Wu, Feng Chu, Chengbin Chu, MengChu Zhou. A novel approach to scheduling of single-arm cluster tools with wafer revisiting. In IEEE Conference on Automation Science and Engineering, CASE 2009, Bangalore, India, 22-25 August, 2011. pages 567-572, IEEE, 2009. [doi]
@inproceedings{WuCCZ09-0,
title = {A novel approach to scheduling of single-arm cluster tools with wafer revisiting},
author = {Naiqi Wu and Feng Chu and Chengbin Chu and MengChu Zhou},
year = {2009},
doi = {10.1109/COASE.2009.5234146},
url = {http://dx.doi.org/10.1109/COASE.2009.5234146},
researchr = {https://researchr.org/publication/WuCCZ09-0},
cites = {0},
citedby = {0},
pages = {567-572},
booktitle = {IEEE Conference on Automation Science and Engineering, CASE 2009, Bangalore, India, 22-25 August, 2011},
publisher = {IEEE},
isbn = {978-1-4244-4578-3},
}