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Tracking Control of PZT-Driven Compliant Precision Positioning Micromanipulator

Zhigang Wu, Min Chen, Ping He 0004, Heng Li 0001, Qi Zhang, Xing-Zhong Xiong, Haoyang Mi, Zuxin Li, Yangmin Li 0001. Tracking Control of PZT-Driven Compliant Precision Positioning Micromanipulator. IEEE Access, 8:126477-126487, 2020. [doi]

Authors

Zhigang Wu

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Min Chen

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Ping He 0004

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Heng Li 0001

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Qi Zhang

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Xing-Zhong Xiong

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Haoyang Mi

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Zuxin Li

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Yangmin Li 0001

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