Lateral characteristic calibration of an atomic force microscope using a Cr atomic deposition grating

Junjie Wu, Xiaoyu Cai, Yuan Li, Yunxia Fu, Jiasi Wei. Lateral characteristic calibration of an atomic force microscope using a Cr atomic deposition grating. In 16th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021, Xiamen, China, April 25-29, 2021. pages 255-258, IEEE, 2021. [doi]

Abstract

Abstract is missing.