Wei-Ming Wu, Fan-Tien Cheng, Deng-Lin Zeng, Tung-Ho Lin, Jyun-Fang Chen. Developing a selection scheme for dual virtual-metrology outputs. In 2008 IEEE International Conference on Automation Science and Engineering, IEEE CASE 2008, Washington, DC, USA, August 23-26, 2008. pages 230-235, IEEE, 2008. [doi]
@inproceedings{WuCZLC08,
title = {Developing a selection scheme for dual virtual-metrology outputs},
author = {Wei-Ming Wu and Fan-Tien Cheng and Deng-Lin Zeng and Tung-Ho Lin and Jyun-Fang Chen},
year = {2008},
doi = {10.1109/COASE.2008.4626525},
url = {http://dx.doi.org/10.1109/COASE.2008.4626525},
researchr = {https://researchr.org/publication/WuCZLC08},
cites = {0},
citedby = {0},
pages = {230-235},
booktitle = {2008 IEEE International Conference on Automation Science and Engineering, IEEE CASE 2008, Washington, DC, USA, August 23-26, 2008},
publisher = {IEEE},
isbn = {978-1-4244-2022-3},
}