Chen Wu, Xudong Fang, Zhihong Feng, Qiang Kang, Yuanjie Lv, Yuefei Yan, Zhuangde Jiang. Ohmic Contact Characteristics of Silicon Carbide-based MEMS Devices. In 16th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021, Xiamen, China, April 25-29, 2021. pages 334-338, IEEE, 2021. [doi]
Abstract is missing.