Guoqiang Wu, Beibei Han, Daw Don Cheam, Leong Ching Wai, Peter Hyun Kee Chang, Navab Singh, Yuandong Gu. Development of Six-Degree-of-Freedom Inertial Sensors With an 8-in Advanced MEMS Fabrication Platform. IEEE Transactions on Industrial Electronics, 66(5):3835-3842, 2019. [doi]
Abstract is missing.