Wafer-scale grating mapping system for rapid pitch and diffraction efficiency measurement - researchr publication authors

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Zon-Ru Wu, Tzu-Chieh Kao, Chia-Wei Kao, Ping-Chien Chang, Wei Lin, Yung-Jr Hung. Wafer-scale grating mapping system for rapid pitch and diffraction efficiency measurement. In 2019 24th OptoElectronics and Communications Conference (OECC) and 2019 International Conference on Photonics in Switching and Computing (PSC), Fukuoka, Japan, July 7-11, 2019. pages 1-3, IEEE, 2019. [doi]

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