Quantum Mechanical Connection of Schottky Emission Process and Its implications on Breakdown Methodology and Conduction Modeling for BEOL Low-k Dielectrics

Ernest Y. Wu, Baozhen Li. Quantum Mechanical Connection of Schottky Emission Process and Its implications on Breakdown Methodology and Conduction Modeling for BEOL Low-k Dielectrics. In IEEE International Reliability Physics Symposium, IRPS 2022, Dallas, TX, USA, March 27-31, 2022. pages 10, IEEE, 2022. [doi]

@inproceedings{WuL22-12,
  title = {Quantum Mechanical Connection of Schottky Emission Process and Its implications on Breakdown Methodology and Conduction Modeling for BEOL Low-k Dielectrics},
  author = {Ernest Y. Wu and Baozhen Li},
  year = {2022},
  doi = {10.1109/IRPS48227.2022.9764501},
  url = {https://doi.org/10.1109/IRPS48227.2022.9764501},
  researchr = {https://researchr.org/publication/WuL22-12},
  cites = {0},
  citedby = {0},
  pages = {10},
  booktitle = {IEEE International Reliability Physics Symposium, IRPS 2022, Dallas, TX, USA, March 27-31, 2022},
  publisher = {IEEE},
  isbn = {978-1-6654-7950-9},
}