Electrical properties of micro-heaters using sputtered NiCr thin film - researchr publication authors

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Ting-Ting Wu, Jing-Quan Liu, Shui-Dong Jiang, Bin Xu, Bin Yang, Hongying Zhu, Chunsheng Yang. Electrical properties of micro-heaters using sputtered NiCr thin film. In 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013, Suzhou, China, April 7-10, 2013. pages 466-469, IEEE, 2013. [doi]

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