Electrical properties of micro-heaters using sputtered NiCr thin film

Ting-Ting Wu, Jing-Quan Liu, Shui-Dong Jiang, Bin Xu, Bin Yang, Hongying Zhu, Chunsheng Yang. Electrical properties of micro-heaters using sputtered NiCr thin film. In 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013, Suzhou, China, April 7-10, 2013. pages 466-469, IEEE, 2013. [doi]

@inproceedings{WuLJXYZY13,
  title = {Electrical properties of micro-heaters using sputtered NiCr thin film},
  author = {Ting-Ting Wu and Jing-Quan Liu and Shui-Dong Jiang and Bin Xu and Bin Yang and Hongying Zhu and Chunsheng Yang},
  year = {2013},
  doi = {10.1109/NEMS.2013.6559771},
  url = {http://dx.doi.org/10.1109/NEMS.2013.6559771},
  researchr = {https://researchr.org/publication/WuLJXYZY13},
  cites = {0},
  citedby = {0},
  pages = {466-469},
  booktitle = {8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013, Suzhou, China, April 7-10, 2013},
  publisher = {IEEE},
}