Fabrication and characterization of silicon nitride nanopore

Lingzhi Wu, Hang Liu, Yuqi Liu, Hao Chen, Quanjun Liu, Zuhong Lu. Fabrication and characterization of silicon nitride nanopore. In Jean X. Gao, Dongrong Xu, Xiaoyan Sun, Yingfei Wu, editors, 6th International Conference on Biomedical Engineering and Informatics, BMEI 2013, Hangzhou, China, December 16-18, 2013. pages 363-367, IEEE, 2013. [doi]

Authors

Lingzhi Wu

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Hang Liu

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Yuqi Liu

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Hao Chen

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Quanjun Liu

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Zuhong Lu

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