Fabrication and characterization of silicon nitride nanopore

Lingzhi Wu, Hang Liu, Yuqi Liu, Hao Chen, Quanjun Liu, Zuhong Lu. Fabrication and characterization of silicon nitride nanopore. In Jean X. Gao, Dongrong Xu, Xiaoyan Sun, Yingfei Wu, editors, 6th International Conference on Biomedical Engineering and Informatics, BMEI 2013, Hangzhou, China, December 16-18, 2013. pages 363-367, IEEE, 2013. [doi]

@inproceedings{WuLLCLL13,
  title = {Fabrication and characterization of silicon nitride nanopore},
  author = {Lingzhi Wu and Hang Liu and Yuqi Liu and Hao Chen and Quanjun Liu and Zuhong Lu},
  year = {2013},
  doi = {10.1109/BMEI.2013.6746964},
  url = {http://dx.doi.org/10.1109/BMEI.2013.6746964},
  researchr = {https://researchr.org/publication/WuLLCLL13},
  cites = {0},
  citedby = {0},
  pages = {363-367},
  booktitle = {6th International Conference on Biomedical Engineering and Informatics, BMEI 2013, Hangzhou, China, December 16-18, 2013},
  editor = {Jean X. Gao and Dongrong Xu and Xiaoyan Sun and Yingfei Wu},
  publisher = {IEEE},
  isbn = {978-1-4799-2761-6},
}