Field enhancement of omega-shaped-gated poly-Si TFT SONOS memory fabricated by a simple sidewall spacer formation

Chun-Yu Wu, Ta-Chuan Liao, Ming-H Yu, Sheng-Kai Chen, Chung-Min Tsai, Huang-Chung Cheng. Field enhancement of omega-shaped-gated poly-Si TFT SONOS memory fabricated by a simple sidewall spacer formation. Microelectronics Reliability, 50(5):704-708, 2010. [doi]

Authors

Chun-Yu Wu

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Ta-Chuan Liao

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Ming-H Yu

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Sheng-Kai Chen

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Chung-Min Tsai

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Huang-Chung Cheng

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