Chun-Yu Wu, Ta-Chuan Liao, Ming-H Yu, Sheng-Kai Chen, Chung-Min Tsai, Huang-Chung Cheng. Field enhancement of omega-shaped-gated poly-Si TFT SONOS memory fabricated by a simple sidewall spacer formation. Microelectronics Reliability, 50(5):704-708, 2010. [doi]
Abstract is missing.